CHIPS R&D Beamline Residual Gas Analyzer – Combined Sources Sought/Notice of Intent to Sole Source
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST) is issuing a Combined Sources Sought Notice and Notice of Intent to Sole Source for five (5) Beamline Residual Gas Analyzers (RGAs). NIST intends to award a sole source contract to Newport Corp if no other capable sources are identified. This equipment is crucial for maintaining ultra-high vacuum conditions at NIST's SURF III synchrotron radiation facility in Gaithersburg, MD. Responses are due by June 1, 2026.
Purpose and Background
NIST's Physical Measurements Laboratory (PML) Sensor Science Division requires these RGAs to support the CHIPS-Metrology program, which aims to improve calibration measurements for mirror reflectivity and detector responsivity in the extreme ultraviolet region. The RGAs will analyze residual gas composition and quantify high molecular mass species to protect the SURF III accelerator system and beamlines from contamination, ensuring the integrity of EUV Lithography and "Beyond EUV" research.
Required Specifications
NIST requires five (5) Residual Gas Analyzers (MKS model 669-221-021 or equivalent) with the following minimum specifications:
- Compatible with ultra-high vacuum (UHV) systems.
- Mass range from 1 amu to 200 amu (or greater).
- Double quadrupole mass filter.
- Dual Faraday and Electron Multiplier detection with sensitivity to 5e-14 mbar (or lower) and 1e-4 mbar (or higher).
- Thoria filament.
- Ethernet communications with computer control of RGA parameters.
- Contractor-provided software for operation, calibration, and data management compatible with Windows OS.
Contract & Timeline
- Type: Combined Sources Sought / Notice of Intent to Sole Source
- NAICS: 334516 (Measuring, Testing, and Navigational Instruments Manufacturing)
- Set-Aside: None specified
- Response Due: June 1, 2026, 3:00 PM ET
- Published: May 18, 2026
Response Instructions
Interested parties should submit responses via email to the primary and secondary points of contact. Responses should not include proprietary information and must detail:
- Company information (name, address, contact, UEI).
- Capability to meet or exceed NIST's minimum requirements.
- Authorized reseller status (if applicable).
- Identification of any unduly restrictive requirements and suggestions for small business participation.
- Small business status.
- Alternative NAICS code (if applicable).
- Existing Federal Supply Schedule or other relevant contracts.
- Firm's experience providing similar products/services.
- Any other valuable market research information.
- Indication of interest in further engagement.
Important Notes
This notice is for market research and planning purposes only and does not constitute a solicitation or commitment to award a contract. Responses will not be considered proposals or quotations, and no award will be made as a result of this notice. NIST will not be responsible for any costs incurred by respondents. Questions regarding this notice should be submitted within 5 days of the initial posting.