Combined Sources Sought Notice and Notice of Intent to Sole Source for a Silane Distribution System for the Boulder Microfabrication Facility

Quick Summary

The National Institute of Standards and Technology (NIST) in Boulder, CO, has issued a Combined Sources Sought Notice and Notice of Intent to Sole Source for a Silane Distribution System for its Boulder Microfabrication Facility (BMF). NIST intends to award a sole source contract to CVD Equipment Corporation if no other capable sources are identified. Responses from interested parties are due by June 6, 2026.

Scope of Work

NIST requires a new silane distribution system, including a gas rack and a Gas Valve Manifold Box (VMB), to replace an end-of-life system in the BMF. This system is critical for safety and operational continuity, handling toxic and pyrophoric silane gas. The new system must be compatible with existing life safety equipment, such as the toxic gas monitoring system (TGMS) and other gas cabinets.

Key requirements include:

• Gas Rack: Must be a CiphercoN™ 1500 Gas Rack or equivalent, compatible with existing SDC CiphercoN™ infrastructure, designed for outdoor use in Boulder, capable of delivering UHP silane and nitrogen purge, and meeting SEMI S2/CGA-13 standards. Features include integrated UVIR detection, safety shutoffs, EMO button, and communication with TGMS.
• Gas Valve Manifold Box (VMB): Must be a FlexGas™ VMB or equivalent, capable of delivering UHP silane to up to 8 process tools, compatible with silane, and meeting SEMI S2/CGA-13 standards. It requires fully automated, computer-controlled operation, nitrogen purge, integrated UVIR detection, safety shutoffs, EMO button, and TGMS communication.
• All items must be new; prototypes, used, or refurbished instruments are unacceptable.
• Contractor personnel must pass government background checks and obtain NIST security badges.
• Contractor is responsible for delivery, commissioning, and acceptance testing.

Contract & Timeline

• Type: Combined Sources Sought Notice and Notice of Intent to Sole Source
• NAICS: 333242, Semiconductor Machinery Manufacturing
• Set-Aside: None specified (intent to sole source)
• Response Due: June 6, 2026, 2:00 PM MT
• Published: May 22, 2026
• Intended Sole Source Vendor: CVD Equipment Corporation, 355 South Technology Drive, Central Islip, NY 11722, US

Response Requirements

Interested parties must submit responses via email to the primary and secondary points of contact. Responses should not exceed 10 pages and must include:

• Company name, address, contact information, and UEI.
• Identification of equipment that meets the objectives, including manufacturer, model, technical specifications, and reseller status if applicable.
• Description of performance capabilities, customization limits, and any additional features.
• Identification of any aspects of the NIST requirements that cannot be met and suggestions for increased competitiveness.
• Manufacturing location of proposed equipment and any planned changes.
• Small business status for NAICS 333242, or a suggested alternative NAICS code.
• Description of available services (installation, training, maintenance) and standard terms of sale.
• Information on facility renovation services, if offered.
• Published price, discount, or rebate arrangements, or a link to pricing.
• Identification of any existing Federal Supply Schedule or other contracts.
• Customer references (public or private sector).
• Any other valuable information for NIST's market research.
• Indication if additional information or a meeting with NIST representatives is required.

Additional Notes

This notice is for market research only and does not constitute a commitment by NIST to issue a solicitation or award a contract. NIST is not obligated to pay for information provided. Responses will be used to determine potential alternate sources. Questions should be submitted 5 calendar days prior to the response date.